Fractional Order Control of Micro Electro-Mechanical Systems

Document Type: Research Paper


Department of Electrical Engineering, Faculty of Engineering, Garmsar Branch, Islamic Azad University, Garmsar, Iran


This paper addresses the problem of the fractional sliding mode control (FSMC) for a MEMS optical switch. The proposed scheme utilizes a fractional sliding surface to describe dynamic behavior of the system in the sliding mode stage. After a comparison with the classical integer-order counterpart, it is seen that the control system with the proposed sliding surface displays better transient performance. The claims are justified through a set of simulations and the results obtained are found promising. Overall, the contribution of this paper is to demonstrate that the response of the system under control is significantly better for the fractional-order differentiation exploited in the sliding surface design stage than that for the classical integer-order one, under the same conditions.